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Reflexion®

Our Reflexion platform is the industry's leading chemical mechanical planarization (CMP) platform,used for all segments (logic,foundry,DRAM,Flash,prime silicon,and wafer-level packaging) and the full complement of dielectric and metal applications.Systems using Reflexion platforms are equipped with industry-leading Titan polishing heads,in-situ process controls,and Marangoni vapor drying technologies.They also incorporate our unique approach to transporting wafers directly from one polishing platen to the next.